Silicon deposition from disilane on Si(100)-2×1: microscopic model including adsorption.
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| Title: | Silicon deposition from disilane on Si(100)-2×1: microscopic model including adsorption. |
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| Authors: | Ferguson, B. A., Reeves, C. T., Safarik, D. J. |
| Source: | Journal of Applied Physics; November 15 2001, Vol. 90 Issue 10, p4981-4989, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1402141 |
