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Silicon deposition from disilane on Si(100)-2×1: microscopic model including adsorption.

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Bibliographic Details
Title: Silicon deposition from disilane on Si(100)-2×1: microscopic model including adsorption.
Authors: Ferguson, B. A., Reeves, C. T., Safarik, D. J.
Source: Journal of Applied Physics; November 15 2001, Vol. 90 Issue 10, p4981-4989, 9p
Database: Applied Science & Technology Source
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