Metalorganic chemical vapor deposition of very thin Pb(Zr,Ti)O3 thin films at low temperatures for high-density ferroelectric memory applications.
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| Title: | Metalorganic chemical vapor deposition of very thin Pb(Zr,Ti)O3 thin films at low temperatures for high-density ferroelectric memory applications. |
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| Authors: | Kim, Hye Ryoung, Jeong, Seehwa, Jeon, Chung Bae |
| Source: | Journal of Materials Research; December 2001, Vol. 16 Issue 12, p3583-3591, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 08842914 |
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| DOI: | 10.1557/JMR.2001.0491 |
