Fabrication of high performance low-temperature poly-Si thin-film transistors using a modulated process.
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| Title: | Fabrication of high performance low-temperature poly-Si thin-film transistors using a modulated process. |
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| Authors: | Fan, Ching-Lin, Chen, Mao-Chieh |
| Source: | Journal of the Electrochemical Society; April 2002, Vol. 149 Issue 4, pH93-H97, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.1452123 |
