APA (7th ed.) Citation

Fan, C., & Chen, M. (2002). Fabrication of high performance low-temperature poly-Si thin-film transistors using a modulated process. Journal of the Electrochemical Society, 149(4), H93. https://doi.org/10.1149/1.1452123

Chicago Style (17th ed.) Citation

Fan, Ching-Lin, and Mao-Chieh Chen. "Fabrication of High Performance Low-temperature Poly-Si Thin-film Transistors Using a Modulated Process." Journal of the Electrochemical Society 149, no. 4 (2002): H93. https://doi.org/10.1149/1.1452123.

MLA (9th ed.) Citation

Fan, Ching-Lin, and Mao-Chieh Chen. "Fabrication of High Performance Low-temperature Poly-Si Thin-film Transistors Using a Modulated Process." Journal of the Electrochemical Society, vol. 149, no. 4, 2002, p. H93, https://doi.org/10.1149/1.1452123.