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Fabrication of high performance low-temperature poly-Si thin-film transistors using a modulated process.

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Bibliographic Details
Title: Fabrication of high performance low-temperature poly-Si thin-film transistors using a modulated process.
Authors: Fan, Ching-Lin, Chen, Mao-Chieh
Source: Journal of the Electrochemical Society; April 2002, Vol. 149 Issue 4, pH93-H97, 5p
Database: Applied Science & Technology Source
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