Growth and Doping of SiC-Thin Films on Low-Stress, Amorphous Si3N4/Si Substrates for Robust Microelectromechanical Systems Applications.
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| Title: | Growth and Doping of SiC-Thin Films on Low-Stress, Amorphous Si3N4/Si Substrates for Robust Microelectromechanical Systems Applications. |
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| Authors: | Cheng, L., Pan, M., Scofield, J. |
| Source: | Journal of Electronic Materials; May 2002, Vol. 31 Issue 5, p361-365, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 03615235 |
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| DOI: | 10.1007/s11664-002-0083-x |
