View in EDS PDF Full Text

Growth and Doping of SiC-Thin Films on Low-Stress, Amorphous Si3N4/Si Substrates for Robust Microelectromechanical Systems Applications.

Saved in:
Bibliographic Details
Title: Growth and Doping of SiC-Thin Films on Low-Stress, Amorphous Si3N4/Si Substrates for Robust Microelectromechanical Systems Applications.
Authors: Cheng, L., Pan, M., Scofield, J.
Source: Journal of Electronic Materials; May 2002, Vol. 31 Issue 5, p361-365, 5p
Database: Applied Science & Technology Source
FullText Links:
  – Type: pdflink
Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500864992
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Growth and Doping of SiC-Thin Films on Low-Stress, Amorphous Si3N4/Si Substrates for Robust Microelectromechanical Systems Applications.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Cheng%2C+L%2E%22">Cheng, L.</searchLink><br /><searchLink fieldCode="AU" term="%22Pan%2C+M%2E%22">Pan, M.</searchLink><br /><searchLink fieldCode="AU" term="%22Scofield%2C+J%2E%22">Scofield, J.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Electronic+Materials%22">Journal of Electronic Materials</searchLink>; May 2002, Vol. 31 Issue 5, p361-365, 5p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500864992
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s11664-002-0083-x
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 5
        StartPage: 361
    Titles:
      – TitleFull: Growth and Doping of SiC-Thin Films on Low-Stress, Amorphous Si3N4/Si Substrates for Robust Microelectromechanical Systems Applications.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Cheng, L.
      – PersonEntity:
          Name:
            NameFull: Pan, M.
      – PersonEntity:
          Name:
            NameFull: Scofield, J.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 05
              Text: May 2002
              Type: published
              Y: 2002
          Identifiers:
            – Type: issn-print
              Value: 03615235
          Numbering:
            – Type: volume
              Value: 31
            – Type: issue
              Value: 5
          Titles:
            – TitleFull: Journal of Electronic Materials
              Type: main
ResultId 1