A Novel Two-Step Annealing Technique for the Fabrication of High Performance Low Temperature Poly-Si TFTs.
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| Title: | A Novel Two-Step Annealing Technique for the Fabrication of High Performance Low Temperature Poly-Si TFTs. |
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| Authors: | Fan, Ching-Lin, Chen, Mao-Chieh, Chang, Yih |
| Source: | Journal of the Electrochemical Society; August 2003, Vol. 150 Issue 8, pH178-H181, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.1590997 |
