Silicon self-diffusivity measurement in thermal SiO2 by 30Si/28Si isotopic exchange.
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| Title: | Silicon self-diffusivity measurement in thermal SiO2 by 30Si/28Si isotopic exchange. |
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| Authors: | Mathiot, D., Schunck, J. P., Perego, M. |
| Source: | Journal of Applied Physics; August 1 2003, Vol. 94 Issue 3, p2136-2138, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1589168 |
