Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracy.
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| Title: | Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracy. |
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| Authors: | Mercere, Pascal, Zeitoun, Philippe, Idir, Mourad |
| Source: | Optics Letters; September 1 2003, Vol. 28 Issue 17, p1534-1536, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 01469592 |
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| DOI: | 10.1364/OL.28.001534 |
