MOCVD of PZT Thin Films with Different Precursor Solutions for Testing Mass-Production Compatibility.
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| Title: | MOCVD of PZT Thin Films with Different Precursor Solutions for Testing Mass-Production Compatibility. |
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| Authors: | Jeong, Seehwa, Shi-Zhao, Jin, Kim, Hye Ryoung |
| Source: | Journal of the Electrochemical Society; October 2003, Vol. 150 Issue 10, pC678-C687, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.1602082 |
