Analytical Approach and Numerical α-Lines Method for Pull-In Hyper-Surface Extraction of Electrostatic Actuators With Multiple Uncoupled Voltage Sources.
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| Title: | Analytical Approach and Numerical α-Lines Method for Pull-In Hyper-Surface Extraction of Electrostatic Actuators With Multiple Uncoupled Voltage Sources. |
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| Authors: | Elata, David, Bochobza-Degani, Ofir, Nemirovsky, Yael |
| Source: | Journal of Microelectromechanical Systems; October 2003, Vol. 12 Issue 5, p681-691, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2003.818456 |
