Carbon in silicon: Modeling of diffusion and clustering mechanisms.
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| Title: | Carbon in silicon: Modeling of diffusion and clustering mechanisms. |
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| Authors: | Pinacho, R., Castrillo, P., Jaraiz, M. |
| Source: | Journal of Applied Physics; August 1 2002, Vol. 92 Issue 3, p1582-1587, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1489715 |
