Discrete-path transport theory of physical sputtering.
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| Title: | Discrete-path transport theory of physical sputtering. |
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| Authors: | Stepanova, M., Dew, S. K. |
| Source: | Journal of Applied Physics; August 1 2002, Vol. 92 Issue 3, p1699-1708, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1488245 |
