APA (7th ed.) Citation

Stepanova, M., & Dew, S. K. (2002). Discrete-path transport theory of physical sputtering. Journal of Applied Physics, 92(3), 1699. https://doi.org/10.1063/1.1488245

Chicago Style (17th ed.) Citation

Stepanova, M., and S. K. Dew. "Discrete-path Transport Theory of Physical Sputtering." Journal of Applied Physics 92, no. 3 (2002): 1699. https://doi.org/10.1063/1.1488245.

MLA (9th ed.) Citation

Stepanova, M., and S. K. Dew. "Discrete-path Transport Theory of Physical Sputtering." Journal of Applied Physics, vol. 92, no. 3, 2002, p. 1699, https://doi.org/10.1063/1.1488245.