Improvement of Form Accuracy in Hybrid Machining of Microstructures.

Saved in:

Bibliographic Details
Title:	Improvement of Form Accuracy in Hybrid Machining of Microstructures.
Authors:	Lim, H. S., Kumar, A. Senthil, Rahman, M.
Source:	Journal of Electronic Materials; October 2002, Vol. 31 Issue 10, p1032-1038, 7p
Database:	Applied Science & Technology Source

Description
ISSN:	03615235
DOI:	10.1007/s11664-002-0039-1