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Oxide thickness extraction methods in the nanometer range for statistical measurements.

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Bibliographic Details
Title: Oxide thickness extraction methods in the nanometer range for statistical measurements.
Authors: Leroux, C., Ghibaudo, G., Reimbold, G., Clerc, R., Mathieu, S.
Source: Solid-State Electronics; November 2002, Vol. 46 Issue 11, p1849-1854, 6p
Database: Applied Science & Technology Source
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