Experimental Verification of a Design Methodology for Torsion Actuators Based on a Rapid Pull-In Solver.
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| Title: | Experimental Verification of a Design Methodology for Torsion Actuators Based on a Rapid Pull-In Solver. |
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| Authors: | Bochobza-Degani, Ofir, Nemirovsky, Yael |
| Source: | Journal of Microelectromechanical Systems; Feb2004, Vol. 13 Issue 1, p121-130, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2004.824220 |
