Analytical model for ion angular distribution functions at rf biased surfaces with collisionless plasma sheaths.
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| Title: | Analytical model for ion angular distribution functions at rf biased surfaces with collisionless plasma sheaths. |
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| Authors: | Raja, Laxminarayan L., Linne, Mark |
| Source: | Journal of Applied Physics; December 15 2002, Vol. 92 Issue 12, p7032-7040, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1524020 |
