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Analytical model for ion angular distribution functions at rf biased surfaces with collisionless plasma sheaths.

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Title: Analytical model for ion angular distribution functions at rf biased surfaces with collisionless plasma sheaths.
Authors: Raja, Laxminarayan L., Linne, Mark
Source: Journal of Applied Physics; December 15 2002, Vol. 92 Issue 12, p7032-7040, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500967974
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Analytical model for ion angular distribution functions at rf biased surfaces with collisionless plasma sheaths.
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  Data: <searchLink fieldCode="AU" term="%22Raja%2C+Laxminarayan+L%2E%22">Raja, Laxminarayan L.</searchLink><br /><searchLink fieldCode="AU" term="%22Linne%2C+Mark%22">Linne, Mark</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; December 15 2002, Vol. 92 Issue 12, p7032-7040, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500967974
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1063/1.1524020
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 9
        StartPage: 7032
    Titles:
      – TitleFull: Analytical model for ion angular distribution functions at rf biased surfaces with collisionless plasma sheaths.
        Type: main
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            NameFull: Raja, Laxminarayan L.
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            NameFull: Linne, Mark
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              M: 12
              Text: December 15 2002
              Type: published
              Y: 2002
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              Value: 92
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              Value: 12
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            – TitleFull: Journal of Applied Physics
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