Dielectric properties of AlN film on Si substrate.

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Bibliographic Details
Title:	Dielectric properties of AlN film on Si substrate.
Authors:	Bi, Z. X., Zheng, Y. D., Zhang, R.
Source:	Journal of Materials Science: Materials in Electronics; May2004, Vol. 15 Issue 5, p317-320, 4p
Database:	Applied Science & Technology Source

Description
ISSN:	09574522
DOI:	10.1023/B:JMSE.0000024233.82681.dc