APA (7th ed.) Citation

Bi, Z. X., Zheng, Y. D., & Zhang, R. (2004). Dielectric properties of AlN film on Si substrate. Journal of Materials Science: Materials in Electronics, 15(5), 317. https://doi.org/10.1023/B:JMSE.0000024233.82681.dc

Chicago Style (17th ed.) Citation

Bi, Z. X., Y. D. Zheng, and R. Zhang. "Dielectric Properties of AlN Film on Si Substrate." Journal of Materials Science: Materials in Electronics 15, no. 5 (2004): 317. https://doi.org/10.1023/B:JMSE.0000024233.82681.dc.

MLA (9th ed.) Citation

Bi, Z. X., et al. "Dielectric Properties of AlN Film on Si Substrate." Journal of Materials Science: Materials in Electronics, vol. 15, no. 5, 2004, p. 317, https://doi.org/10.1023/B:JMSE.0000024233.82681.dc.