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Dielectric properties of AlN film on Si substrate.

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Bibliographic Details
Title: Dielectric properties of AlN film on Si substrate.
Authors: Bi, Z. X., Zheng, Y. D., Zhang, R.
Source: Journal of Materials Science: Materials in Electronics; May2004, Vol. 15 Issue 5, p317-320, 4p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
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PubType: Academic Journal
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  Data: Dielectric properties of AlN film on Si substrate.
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        Value: 10.1023/B:JMSE.0000024233.82681.dc
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        Text: English
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        StartPage: 317
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      – TitleFull: Dielectric properties of AlN film on Si substrate.
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              Text: May2004
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              Y: 2004
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