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Inductively coupled plasma etching of SiC in SF6/O2 and etch-induced surface chemical bonding modifications.

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Bibliographic Details
Title: Inductively coupled plasma etching of SiC in SF6/O2 and etch-induced surface chemical bonding modifications.
Authors: Jiang, Liudi, Cheung, R., Brown, R.
Source: Journal of Applied Physics; February 1 2003, Vol. 93 Issue 3, p1376-1383, 8p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500990463
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Inductively coupled plasma etching of SiC in SF6/O2 and etch-induced surface chemical bonding modifications.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Jiang%2C+Liudi%22">Jiang, Liudi</searchLink><br /><searchLink fieldCode="AU" term="%22Cheung%2C+R%2E%22">Cheung, R.</searchLink><br /><searchLink fieldCode="AU" term="%22Brown%2C+R%2E%22">Brown, R.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; February 1 2003, Vol. 93 Issue 3, p1376-1383, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500990463
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.1534908
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 1376
    Titles:
      – TitleFull: Inductively coupled plasma etching of SiC in SF6/O2 and etch-induced surface chemical bonding modifications.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Jiang, Liudi
      – PersonEntity:
          Name:
            NameFull: Cheung, R.
      – PersonEntity:
          Name:
            NameFull: Brown, R.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 02
              Text: February 1 2003
              Type: published
              Y: 2003
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 93
            – Type: issue
              Value: 3
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1