High-selectivity etching of polycrystalline 3C-SiC films using HBr-based transformer coupled plasma.
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| Title: | High-selectivity etching of polycrystalline 3C-SiC films using HBr-based transformer coupled plasma. |
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| Authors: | Gao, Di, Howe, Roger T., Maboudian, Roya |
| Source: | Applied Physics Letters; March 17 2003, Vol. 82 Issue 11, p1742-1744, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.1560561 |
