High-selectivity etching of polycrystalline 3C-SiC films using HBr-based transformer coupled plasma.
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| Title: | High-selectivity etching of polycrystalline 3C-SiC films using HBr-based transformer coupled plasma. |
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| Authors: | Gao, Di, Howe, Roger T., Maboudian, Roya |
| Source: | Applied Physics Letters; March 17 2003, Vol. 82 Issue 11, p1742-1744, 3p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 501011445 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: High-selectivity etching of polycrystalline 3C-SiC films using HBr-based transformer coupled plasma. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Gao%2C+Di%22">Gao, Di</searchLink><br /><searchLink fieldCode="AU" term="%22Howe%2C+Roger+T%2E%22">Howe, Roger T.</searchLink><br /><searchLink fieldCode="AU" term="%22Maboudian%2C+Roya%22">Maboudian, Roya</searchLink> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Applied+Physics+Letters%22">Applied Physics Letters</searchLink>; March 17 2003, Vol. 82 Issue 11, p1742-1744, 3p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501011445 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/1.1560561 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 3 StartPage: 1742 Titles: – TitleFull: High-selectivity etching of polycrystalline 3C-SiC films using HBr-based transformer coupled plasma. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Gao, Di – PersonEntity: Name: NameFull: Howe, Roger T. – PersonEntity: Name: NameFull: Maboudian, Roya IsPartOfRelationships: – BibEntity: Dates: – D: 17 M: 03 Text: March 17 2003 Type: published Y: 2003 Identifiers: – Type: issn-print Value: 00036951 Numbering: – Type: volume Value: 82 – Type: issue Value: 11 Titles: – TitleFull: Applied Physics Letters Type: main |
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