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Pulsed-Laser Annealing, a Low-Thermal-Budget Technique for Eliminating Stress Gradient in Poly-SiGe MEMS Structures.

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Bibliographic Details
Title: Pulsed-Laser Annealing, a Low-Thermal-Budget Technique for Eliminating Stress Gradient in Poly-SiGe MEMS Structures.
Authors: Sedky, Sherif, Howe, Roger T., King, Tsu-Jac
Source: Journal of Microelectromechanical Systems; Aug2004, Vol. 13 Issue 4, p669-675, 7p
Database: Applied Science & Technology Source
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