APA (7th ed.) Citation

Tang, D. L., Fu, R. K. Y., & Tian, X. B. (2003). Improved planar radio frequency inductively coupled plasma configuration in plasma immersion ion implantation. Review of Scientific Instruments, 74(5), 2704. https://doi.org/10.1063/1.1568559

Chicago Style (17th ed.) Citation

Tang, D. L., R. K. Y. Fu, and X. B. Tian. "Improved Planar Radio Frequency Inductively Coupled Plasma Configuration in Plasma Immersion Ion Implantation." Review of Scientific Instruments 74, no. 5 (2003): 2704. https://doi.org/10.1063/1.1568559.

MLA (9th ed.) Citation

Tang, D. L., et al. "Improved Planar Radio Frequency Inductively Coupled Plasma Configuration in Plasma Immersion Ion Implantation." Review of Scientific Instruments, vol. 74, no. 5, 2003, p. 2704, https://doi.org/10.1063/1.1568559.