Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films.
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| Title: | Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films. |
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| Authors: | Patsalas, P., Gravalidis, C., Logothetidis, S. |
| Source: | Journal of Applied Physics; 12/1/2004, Vol. 96 Issue 11, p6234-6246, 13p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1811389 |
