APA (7th ed.) Citation

Patsalas, P., Gravalidis, C., & Logothetidis, S. (2004). Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films. Journal of Applied Physics, 96(11), 6234. https://doi.org/10.1063/1.1811389

Chicago Style (17th ed.) Citation

Patsalas, P., C. Gravalidis, and S. Logothetidis. "Surface Kinetics and Subplantation Phenomena Affecting the Texture, Morphology, Stress, and Growth Evolution of Titanium Nitride Films." Journal of Applied Physics 96, no. 11 (2004): 6234. https://doi.org/10.1063/1.1811389.

MLA (9th ed.) Citation

Patsalas, P., et al. "Surface Kinetics and Subplantation Phenomena Affecting the Texture, Morphology, Stress, and Growth Evolution of Titanium Nitride Films." Journal of Applied Physics, vol. 96, no. 11, 2004, p. 6234, https://doi.org/10.1063/1.1811389.