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Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films.

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Title: Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films.
Authors: Patsalas, P., Gravalidis, C., Logothetidis, S.
Source: Journal of Applied Physics; 12/1/2004, Vol. 96 Issue 11, p6234-6246, 13p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501065158
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films.
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  Data: <searchLink fieldCode="AU" term="%22Patsalas%2C+P%2E%22">Patsalas, P.</searchLink><br /><searchLink fieldCode="AU" term="%22Gravalidis%2C+C%2E%22">Gravalidis, C.</searchLink><br /><searchLink fieldCode="AU" term="%22Logothetidis%2C+S%2E%22">Logothetidis, S.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; 12/1/2004, Vol. 96 Issue 11, p6234-6246, 13p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501065158
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1063/1.1811389
    Languages:
      – Code: eng
        Text: English
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        PageCount: 13
        StartPage: 6234
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      – TitleFull: Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films.
        Type: main
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            NameFull: Patsalas, P.
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            NameFull: Gravalidis, C.
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            – D: 01
              M: 12
              Text: 12/1/2004
              Type: published
              Y: 2004
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