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Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films.

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Bibliographic Details
Title: Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films.
Authors: Patsalas, P., Gravalidis, C., Logothetidis, S.
Source: Journal of Applied Physics; 12/1/2004, Vol. 96 Issue 11, p6234-6246, 13p
Database: Applied Science & Technology Source
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