Effect of Pad Groove Designs on the Frictional and Removal Rate Characteristics of ILD CMP.
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| Title: | Effect of Pad Groove Designs on the Frictional and Removal Rate Characteristics of ILD CMP. |
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| Authors: | Rosales-Yeomans, D., Doi, T., Kinoshita, A. |
| Source: | Journal of the Electrochemical Society; 2005, Vol. 152 Issue 1, pG62-G67, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.1836127 |
