View in EDS

Effect of Pad Groove Designs on the Frictional and Removal Rate Characteristics of ILD CMP.

Saved in:
Bibliographic Details
Title: Effect of Pad Groove Designs on the Frictional and Removal Rate Characteristics of ILD CMP.
Authors: Rosales-Yeomans, D., Doi, T., Kinoshita, A.
Source: Journal of the Electrochemical Society; 2005, Vol. 152 Issue 1, pG62-G67, 6p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501075519
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Effect of Pad Groove Designs on the Frictional and Removal Rate Characteristics of ILD CMP.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Rosales-Yeomans%2C+D%2E%22">Rosales-Yeomans, D.</searchLink><br /><searchLink fieldCode="AU" term="%22Doi%2C+T%2E%22">Doi, T.</searchLink><br /><searchLink fieldCode="AU" term="%22Kinoshita%2C+A%2E%22">Kinoshita, A.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; 2005, Vol. 152 Issue 1, pG62-G67, 6p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501075519
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1149/1.1836127
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 6
        StartPage: G62
    Titles:
      – TitleFull: Effect of Pad Groove Designs on the Frictional and Removal Rate Characteristics of ILD CMP.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Rosales-Yeomans, D.
      – PersonEntity:
          Name:
            NameFull: Doi, T.
      – PersonEntity:
          Name:
            NameFull: Kinoshita, A.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 01
              Text: 2005
              Type: published
              Y: 2005
          Identifiers:
            – Type: issn-print
              Value: 00134651
          Numbering:
            – Type: volume
              Value: 152
            – Type: issue
              Value: 1
          Titles:
            – TitleFull: Journal of the Electrochemical Society
              Type: main
ResultId 1