Ion Bombardment-Induced High Orientation of Al/Ti Films for Surface Acoustic Wave Device Applications.

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Bibliographic Details
Title:	Ion Bombardment-Induced High Orientation of Al/Ti Films for Surface Acoustic Wave Device Applications.
Authors:	Li, D. M., Pan, F., Niu, J. B.
Source:	Journal of Electronic Materials; July 2005, Vol. 34 Issue 7, p1053-1058, 6p
Database:	Applied Science & Technology Source

Description
ISSN:	03615235
DOI:	10.1007/s11664-005-0095-4