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Ion Bombardment-Induced High Orientation of Al/Ti Films for Surface Acoustic Wave Device Applications.

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Bibliographic Details
Title: Ion Bombardment-Induced High Orientation of Al/Ti Films for Surface Acoustic Wave Device Applications.
Authors: Li, D. M., Pan, F., Niu, J. B.
Source: Journal of Electronic Materials; July 2005, Vol. 34 Issue 7, p1053-1058, 6p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501102624
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PubType: Academic Journal
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  Data: Ion Bombardment-Induced High Orientation of Al/Ti Films for Surface Acoustic Wave Device Applications.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Electronic+Materials%22">Journal of Electronic Materials</searchLink>; July 2005, Vol. 34 Issue 7, p1053-1058, 6p
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        Value: 10.1007/s11664-005-0095-4
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      – Code: eng
        Text: English
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        PageCount: 6
        StartPage: 1053
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      – TitleFull: Ion Bombardment-Induced High Orientation of Al/Ti Films for Surface Acoustic Wave Device Applications.
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            NameFull: Li, D. M.
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            NameFull: Pan, F.
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            NameFull: Niu, J. B.
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              Text: July 2005
              Type: published
              Y: 2005
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              Value: 34
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