Stress stability and thermo-mechanical properties of reactively sputtered alumina films.

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Bibliographic Details
Title:	Stress stability and thermo-mechanical properties of reactively sputtered alumina films.
Authors:	Hughey, M. P., Cook, R. F., Thurn, J.
Source:	Journal of Materials Science; Dec2005, Vol. 40 Issue 24, p6345-6355, 11p
Database:	Applied Science & Technology Source

Description
ISSN:	00222461
DOI:	10.1007/s10853-005-2070-0