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Stress stability and thermo-mechanical properties of reactively sputtered alumina films.

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Title: Stress stability and thermo-mechanical properties of reactively sputtered alumina films.
Authors: Hughey, M. P., Cook, R. F., Thurn, J.
Source: Journal of Materials Science; Dec2005, Vol. 40 Issue 24, p6345-6355, 11p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501187095
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PubType: Academic Journal
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  Data: Stress stability and thermo-mechanical properties of reactively sputtered alumina films.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%22">Journal of Materials Science</searchLink>; Dec2005, Vol. 40 Issue 24, p6345-6355, 11p
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        Value: 10.1007/s10853-005-2070-0
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      – Code: eng
        Text: English
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        PageCount: 11
        StartPage: 6345
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      – TitleFull: Stress stability and thermo-mechanical properties of reactively sputtered alumina films.
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              Text: Dec2005
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              Y: 2005
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