Effect of a mid-temperature thermal annealing on the enhancement of boron diffusion during rapid thermal annealing.
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| Title: | Effect of a mid-temperature thermal annealing on the enhancement of boron diffusion during rapid thermal annealing. |
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| Authors: | Lévêque, P., Mathiot, D., Christensen, J. S. |
| Source: | Journal of Applied Physics; April 1 2006, Vol. 99 Issue 7, p073506-073506, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.2183583 |
