Stress and wafer bending of a-plane GaN layers on r-plane sapphire substrates.
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| Title: | Stress and wafer bending of a-plane GaN layers on r-plane sapphire substrates. |
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| Authors: | Roder, C., Einfeldt, S., Figge, S. |
| Source: | Journal of Applied Physics; November 15 2006, Vol. 100 Issue 10, p103511-103511, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.2386940 |
