Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls.
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| Title: | Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls. |
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| Authors: | Chen, Po-Jui, Rodger, Damien C., Humayun, Mark S. |
| Source: | Journal of Microelectromechanical Systems; December 2008, Vol. 17 Issue 6, p1352-1361, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2008.2004947 |
