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Electrical and Mechanical Characterization of Doped and Annealed Polycrystalline 3C-SiC Thin Films.

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Bibliographic Details
Title: Electrical and Mechanical Characterization of Doped and Annealed Polycrystalline 3C-SiC Thin Films.
Authors: Roper, Christopher S., Radmilovic, Velimir, Howe, Roger T.
Source: Journal of the Electrochemical Society; 2009, Vol. 156 Issue 1, pD5-D10, 6p
Database: Applied Science & Technology Source
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