Characterization of Polycrystalline Silicon-Germanium Film Deposition for Modularly Integrated MEMS Applications.
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| Title: | Characterization of Polycrystalline Silicon-Germanium Film Deposition for Modularly Integrated MEMS Applications. |
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| Authors: | Low, Carrie W., Liu, Tsu-Jae King, Howe, Roger T. |
| Source: | Journal of Microelectromechanical Systems; February 2007, Vol. 16 Issue 1, p68-77, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2006.886030 |
