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Characterization of Polycrystalline Silicon-Germanium Film Deposition for Modularly Integrated MEMS Applications.

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Bibliographic Details
Title: Characterization of Polycrystalline Silicon-Germanium Film Deposition for Modularly Integrated MEMS Applications.
Authors: Low, Carrie W., Liu, Tsu-Jae King, Howe, Roger T.
Source: Journal of Microelectromechanical Systems; February 2007, Vol. 16 Issue 1, p68-77, 10p
Database: Applied Science & Technology Source
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