Synthesis of silicon nanocrystals in silane plasmas for nanoelectronics and large area electronic devices.
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| Title: | Synthesis of silicon nanocrystals in silane plasmas for nanoelectronics and large area electronic devices. |
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| Authors: | Cabarrocas, P. Roca i, Nguyen-Tran, Th, Djeridane, Y. |
| Source: | Journal of Physics: D Applied Physics; April 21 2007, Vol. 40 Issue 8, p2258-2266, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00223727 |
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| DOI: | 10.1088/0022-3727/40/8/S04 |
