Chemically active plasmas for deterministic assembly of nanocrystalline SiC film.
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| Title: | Chemically active plasmas for deterministic assembly of nanocrystalline SiC film. |
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| Authors: | Cheng, Q. J., Long, J. D., Chen, Z. |
| Source: | Journal of Physics: D Applied Physics; April 21 2007, Vol. 40 Issue 8, p2304-2307, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00223727 |
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| DOI: | 10.1088/0022-3727/40/8/S10 |
