A MEMS Singlet Oxygen Generator—Part I: Device Fabrication and Proof of Concept Demonstration.
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| Title: | A MEMS Singlet Oxygen Generator—Part I: Device Fabrication and Proof of Concept Demonstration. |
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| Authors: | Velásquez-Garcia, Luis Fernando, Hill, Tyrone F., Epstein, Alan H. |
| Source: | Journal of Microelectromechanical Systems; December 2007, Vol. 16 Issue 6, p1482-1491, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2007.902446 |
