A MEMS Singlet Oxygen Generator—Part I: Device Fabrication and Proof of Concept Demonstration.

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Bibliographic Details
Title: A MEMS Singlet Oxygen Generator—Part I: Device Fabrication and Proof of Concept Demonstration.
Authors: Velásquez-Garcia, Luis Fernando, Hill, Tyrone F., Epstein, Alan H.
Source: Journal of Microelectromechanical Systems; December 2007, Vol. 16 Issue 6, p1482-1491, 10p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501520529
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: A MEMS Singlet Oxygen Generator—Part I: Device Fabrication and Proof of Concept Demonstration.
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  Data: <searchLink fieldCode="AU" term="%22Velásquez-Garcia%2C+Luis+Fernando%22">Velásquez-Garcia, Luis Fernando</searchLink><br /><searchLink fieldCode="AU" term="%22Hill%2C+Tyrone+F%2E%22">Hill, Tyrone F.</searchLink><br /><searchLink fieldCode="AU" term="%22Epstein%2C+Alan+H%2E%22">Epstein, Alan H.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Microelectromechanical+Systems%22">Journal of Microelectromechanical Systems</searchLink>; December 2007, Vol. 16 Issue 6, p1482-1491, 10p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501520529
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1109/JMEMS.2007.902446
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 10
        StartPage: 1482
    Titles:
      – TitleFull: A MEMS Singlet Oxygen Generator—Part I: Device Fabrication and Proof of Concept Demonstration.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Velásquez-Garcia, Luis Fernando
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          Name:
            NameFull: Hill, Tyrone F.
      – PersonEntity:
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            NameFull: Epstein, Alan H.
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            – D: 01
              M: 12
              Text: December 2007
              Type: published
              Y: 2007
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              Value: 16
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              Value: 6
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            – TitleFull: Journal of Microelectromechanical Systems
              Type: main
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