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A MEMS Singlet Oxygen Generator—Part I: Device Fabrication and Proof of Concept Demonstration.

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Bibliographic Details
Title: A MEMS Singlet Oxygen Generator—Part I: Device Fabrication and Proof of Concept Demonstration.
Authors: Velásquez-Garcia, Luis Fernando, Hill, Tyrone F., Epstein, Alan H.
Source: Journal of Microelectromechanical Systems; December 2007, Vol. 16 Issue 6, p1482-1491, 10p
Database: Applied Science & Technology Source
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